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Features
| 1. |
The world's highest processing speed: 16 sec/wafer
(Full automation of macro inspection makes 100% inspection possible) |
| 2. |
Automatic operation increases inspection consistency
and speed |
| 3. |
The device can be easily retrofitted to the existing
line. |
Effect of the introduction
| Since macro 100% inspection can be fully automated,
the time required for feedback to the upstream process is shortened
and the yield rate and product quality are remarkably improved,
contributing to a substantial reduction in production cost. |
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